計測システム

Keyence LM-X100T

2024 Keyence LM-X100T - Multisensor Measurement System
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Image Sensor 1", 20-Megapixel Monochrome CMOS. Receiver Lens Double Telecentric Lens. Image Measurement Wide-Field Measurement Mode 325 x 175mm. Field Of View High-Precision Measurement Mode 306 × 156mm. Minimum Display Unit 0.1 µm. Repeatability Inside Camera's Field Of View (20) Wide-Field Measurement Mode ±0.5 µm, High-Precision Measurement Mode ±0.1 µm, With Stage Movement XY axis (E1), X/Y plane (E2) ±0.9 µm. Measurement Accuracy Inside Camera's Field Of View (2ơ) Wide-Field Measurement Mode ±2 µm, High-Precision Measurement Mode ±7 µm, With Stage Movement X/Y Axis (E1) ±(1.8 + 0.02 L) µm, X/Y Plane (E2) ±(2.8 + 0.02 L) µm. AF Height Measurement Repeatability ±2 µm, Measurement Accuracy (EUZ,MPE) ±(4.8 + 0.04 L) µm *4. Touch Probe Measurement Measurable Range (X/Y) 248 x 141mm, Measuring Force 0.015N, Minimum Display Unit ±0.1 µm. Repeatability X/Y Axis ±0.14 µm, X/Y Plane ±0.14 µm, Z Axis ±0.14 µm. Measurement Accuracy X/Y Axis (EUX,MPE EUY,MPE) ±(2.8 + 0.02 L)µm, X/Y Plane (EUXY,MPE) ,±(3.8 + 0.02 L)µm Z Axis (EUZ,MPE) ±(4.8 + 0.02 L)µm.

Including Head Unit + Touch Probe, LM-XM20E: LMX Software (1 Off), OP-88752: 1mm Stylus Ball For LM-X (1 Off), OP-88751: 2mm Stylus Ball For LM-X (1 Off), OP-88750: Stylus Adaptor (2 Off), OP-99071 AC Power Supply Cable (UK/Ireland) (3 Off), 972361: Desktop PC & Software For LM-X (1 Off), 972358M: Display Monitor For LM-X (1 Off), LM-H1X: Standard Software (1 Off), LM-H1XE: Offline Editor Software (1 Off), LM-H1XC: CAD Offline Software (1 Off).