マグネトロンスパッタ装置

VON ARDENNE VISS 300

We offer a used vertical sputtering system, an ARDENNE VISS 300.
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The system dates back to 2002 and was expanded with a third chamber in 2016.

The system features an airlock and three chambers equipped with SSM750RF magnetron sputtering units from Ardenne.

This includes one generator from Trumpf Hüttinger, model PFG2500RF.

There is also a dual magnetron sputtering source that is currently not installed, along with the corresponding control unit from Astral.

There is a temperature control unit for one of the two cooling circuits to maintain a constant temperature, e.g., 38°C, as well as two external cooling units with heat exchangers.

Zinc oxide (ZnO) and zinc sulfide (ZnS) were sputtered in the chambers.

The system was in use until the end of May 2026 and was shut down without any defects.

The system was regularly maintained by the operator and is in very good condition.

Before delivery, we will service all installed vacuum backing pumps and turbopumps (bearing replacement).

On request, assembly and commissioning can be arranged on-site.

If you are interested in the system, please do not hesitate to contact us with any further questions.

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